Avancerad sökning

Hittade 3 avhandlingar som matchar ovanstående sökkriterier.

1. 1. Ion beam etching of InP based materials

   Författare :Carl-Fredrik Carlström; KTH; []
   Nyckelord :InP; dry etching; ion beam etching; RIBE; CAIBE; hydrocarbon chemistry; trimethylamine; As P exchange reaction; morphology; low damage; AFM; SCM; annealing;

   Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER

3. 2. Fabrication and Characterization of Integration Compatible Semiconductor Lasers

   Författare :Mats Hagberg; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : This thesis deals with the fabrication and characterization of integration compatible semiconductor lasers. An extensive investigation of electron-beam lithography (EBL) and chemically assisted ion beam etching (CAIBE) for the fabrication of vertical ultra- high quality facets in GaAs, as well as a systematic characterization of grating coupled surface emitting lasers is presented. LÄS MER

4. 3. Two-Dimensional Photonic Crystals in InP-based Materials

   Författare :Mikaël Mulot; KTH; []
   Nyckelord :Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

   Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER