Sökning: "magnetron sputter-deposition"

Visar resultat 1 - 5 av 25 avhandlingar innehållade orden magnetron sputter-deposition.

  1. 1. Reactive Sputter Deposition of Functional Thin Films

    Författare :Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Sammanfattning : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. LÄS MER

  3. 2. Thin metal films on weakly-interacting substrates : Nanoscale growth dynamics, stress generation, and morphology manipulation

    Författare :Andreas Jamnig; Kostas Sarakinos; Gregory Abadias; Gregory Thompson; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Thin films; magnetron sputter-deposition; in situ and real-time characterization; early film growth stages; residual stress; manipulation of morphology; Couches minces; pulvérisation magnétron; caractérisation in situ en temps réel; premiers stades de croissance; contraintes résiduelles; manipulation de morphologie;

    Sammanfattning : Vapor-based growth of thin metal films with controlled morphology on weakly-interacting substrates (WIS), including oxides and van der Waals materials, is essential for the fabrication of multifunctional metal contacts in a wide array of optoelectronic devices. Achieving this entails a great challenge, since weak film/substrate interactions yield a pronounced and uncontrolled 3D morphology. LÄS MER

  4. 3. High-rate reactive magnetron sputter deposition and characterization of metal oxide films

    Författare :Maryam Kharrazi Olsson; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Solid State Physics; fasta tillståndets fysik;

    Sammanfattning : Molybdenum oxide films with good electrochromic properties were produced by single- and dual-target sputtering. Dual-target deposition was shown to be able of yielding optically functional films at much higher rates than that for single-target depositions. LÄS MER

  5. 4. Thin films for indoor air monitoring : Measurements of Volatile Organic Compounds

    Författare :Umut Cindemir; Niklasson Gunnar; Claes-Göran Granqvist; Lars Österlund; Magnus Willander; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; gas sensor; thin film; adcanced gas depostion; sputter deposition; nickel oxide; gold nanoparticles; indium tin oxide; acetaldehyde; formaldehyde;

    Sammanfattning : Volatile organic compounds (VOCs) in the indoor air have adverse effects on the dwellers residing in a building or a vehicle. One of these effects is called sick building syndrome (SBS). LÄS MER

  7. 5. Magnetic Heterostructures : The Effect of Compositional Modulation on Magnetic Properties

    Författare :Inna Soroka; Roger Wäppling; Björgvin Hjörvarsson; Rudolf Schäfer; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Magnetism; Sputter deposition; Superlattice; Multilayers; Materialvetenskap; Materials science; Teknisk materialvetenskap;

    Sammanfattning : The effect of compositional modulation on structural and magnetic properties of magnetic heterostructures was explored. The systems under focus were ferromagnetic superlattices Fe81Ni19/Co, metal-insulator multilayers Al2O3/Ni81Fe19, nanoparticles and artificial multilayered pillars. LÄS MER