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1. Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers
Sammanfattning : This thesis gives an overview about the current status of nanoimprint lithography, a relatively new nanofabrication tool. The technology is capable for parallel mass production of nm-structured features having a resolution below 10 nm and is usable with high throughput on full wafer scale. LÄS MER
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