Sökning: "Steven George"
Hittade 1 avhandling innehållade orden Steven George.
1. CVD and ALD of Group IV- and V-Oxides for Dielectric Applications
Sammanfattning : Due to the constantly decreasing dimensions of electronic devices, the conventional dielectric material in transistors and capacitors, SiO2, has to be replaced by a material with higher dielectric constant. Some of the most promising candidates are tantalum oxide,Ta2O5, zirconium oxide, ZrO2 and hafnium oxide, HfO2. LÄS MER
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