Sökning: "MEMS accelerometers"

Visar resultat 1 - 5 av 9 avhandlingar innehållade orden MEMS accelerometers.

  1. 1. Micromachined Three-Axis Accelerometers and Sensor Readout Electronics

    Författare :Henrik Rödjegård; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; three axis accelerometer; sensor readout; inertial sensors; gyroscope; MEMS; digital feedback; capacitive readout;

    Sammanfattning : Miniaturized, MEMS-based, inertial navigation systems are used to track the position of moving objects without an external reference system. Several existing and future applications such as indoor navigation, stability control of vehicles, active prostheses or training aids for sportsmen would benefit from the small size and the low cost of micromachined inertial sensors. LÄS MER

  3. 2. Additive Manufacturing and Integration of 3D MEMS using Ultrafast Lasers and Magnetic Assembly

    Författare :Simone Pagliano; Frank Niklaus; Göran Stemme; Gijs Krijnen; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; additive manufacturing; 3D printing; 3D micromachining; two-photon polymerization; MEMS; polyimide; ultrafast laser; laser micromachining; vertical integration; magnetic assembly; stochastic assembly; diminutive chips;

    Sammanfattning : The geometry of MEMS devices is limited by the technologies used to fabricate them. Today, microsystems are manufactured with patterning technologies that allow only for 2D and 2.5D geometries. LÄS MER

  4. 3. Vibroacoustic performance of wooden buildings : Prediction and Perception

    Författare :Juan Negreira; Teknisk akustik; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Prediction tools; Low frequency vibrations; Vibroacoustics; Wooden buildings; Impact sound insulation; Finite element method; Vibration measurements; Flanking transmission; Elastomers; Design indicators; Vibration acceptability; Vibration annoyance; MEMS accelerometers;

    Sammanfattning : When the Swedish building regulations in 1994 allowed wooden multi-storey buildings to be built, this type of lightweight construction became popular due to its low cost and ease of construction, as well as wood being a plentiful resource in Sweden. However, complaints amid inhabitants are often reported due to nuisances caused by disturbing vibrations and noise propagating in the building. LÄS MER

  5. 4. Micromechanical three axis accelerometers : design, manufacture and general readout electronics

    Författare :Henrik Rödjegård; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; three axis accelerometer; MEMS accelerometer; sensor test bench; sensor system; bilk micromaching; accelerometer design;

    Sammanfattning : .... LÄS MER

  7. 5. Integration of graphene into MEMS and NEMS for sensing applications

    Författare :Xuge Fan; Frank Niklaus; Peter Steeneken; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; Nano-electromechanical systems NEMS ; heterogeneous 3D integration; Graphene; single-layer graphene; double-layer graphene; bilayer graphene; chemical vapor deposition CVD ; suspended graphene beams; suspended graphene membranes; doubly clamped; fully clamped; silicon on insulator SOI ; vapor hydrofluoric acid VHF ; Young’s modulus; built-in stress; built-in tension; piezoresistivity; gauge factor; accelerometer; resonators; electromechanical sensing; advanced transducers; humidity; gas sensing; sensitivity; CO2 sensing; graphene grain boundary; line defects; optical microscopy; wire bonding; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. LÄS MER