Sökning: "MEMS"
Visar resultat 1 - 5 av 85 avhandlingar innehållade ordet MEMS.
1. Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining
Sammanfattning : This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. LÄS MER
2. Silicon photonic MEMS building blocks for low-power programmable circuits
Sammanfattning : Silicon photonics, or the confinement and control of light in integrated silicon waveguides, has rapidly grown from research labs to high-end chips for telecommunications. With the associated improvements in waveguide performance, the technology is promising for a wide range of new applications, from computing to sensing. LÄS MER
3. Wafer-level heterogeneous integration of MEMS actuators
Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER
4. MEMS-based electrochemical gas sensors and wafer-level methods
Sammanfattning : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. LÄS MER
5. GPS/IMU Integrated System for Land Vehicle Navigation based on MEMS
Sammanfattning : The Global Positioning System (GPS) and an Inertial Navigation System (INS)are two basic navigation systems. Due to their complementary characters in manyaspects, a GPS/INS integrated navigation system has been a hot research topic inthe recent decade. Both advantages and disadvantages of each individual systemare analyzed. LÄS MER