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Hittade 2 avhandlingar som matchar ovanstående sökkriterier.

1. 1. Micromachining by sacrificial aluminium etching

   Författare :David Westberg; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; sacrificial aluminium etching; SALE; CMOS-compatible micromachining; aluminium etching; densitometer; surface micromachining; nozzle; sacrificial etching; inkjet;

   Sammanfattning : .... LÄS MER

3. 2. Silicon dioxide and aluminium nitride as gate dielectric for high temperature and high power silicon carbide MOSFETs

   Författare :Carl-Mikael Zetterling; KTH; []
   Nyckelord :;

   Sammanfattning : Silicon carbide (SIC) is a wide bandgap semiconductor thathas been suggested as a replacement for silicon in applicationsusing high voltages, high frequencies, high temperatures orcombinations thereof. Several basic process steps need to bedeveloped for reliable manufacturing of long-term stableelectronic devices. LÄS MER