Sökning: "sacrificial aluminium etching"
Hittade 2 avhandlingar innehållade orden sacrificial aluminium etching.
1. Micromachining by sacrificial aluminium etching
Sammanfattning : .... LÄS MER
2. Silicon dioxide and aluminium nitride as gate dielectric for high temperature and high power silicon carbide MOSFETs
Sammanfattning : Silicon carbide (SIC) is a wide bandgap semiconductor thathas been suggested as a replacement for silicon in applicationsusing high voltages, high frequencies, high temperatures orcombinations thereof. Several basic process steps need to bedeveloped for reliable manufacturing of long-term stableelectronic devices. LÄS MER
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