Sökning: "ion beam lithography"

Visar resultat 16 - 20 av 32 avhandlingar innehållade orden ion beam lithography.

1. 16. High-Resolution Nanostructuring for Soft X-Ray Zone-Plate Optics

   Författare :Julia Reinspach; Hans M. Hertz; Sasa Bajt; KTH; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; zone plates; x-ray optics; x-ray microscopy; high resolution; nanofabrication; electron beam lithography; reactive ion etching; tungsten; nickel; germanium;

   Sammanfattning : Diffractive zone-plate lenses are widely used as optics in high-resolution x-ray microscopes. The achievable resolution in such microscopes is presently not limited by the x-ray wavelength but by limitations in zone-plate nanofabrication. LÄS MER

3. 17. Fabrication and Characterization of Integration Compatible Semiconductor Lasers

   Författare :Mats Hagberg; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : This thesis deals with the fabrication and characterization of integration compatible semiconductor lasers. An extensive investigation of electron-beam lithography (EBL) and chemically assisted ion beam etching (CAIBE) for the fabrication of vertical ultra- high quality facets in GaAs, as well as a systematic characterization of grating coupled surface emitting lasers is presented. LÄS MER

4. 18. Solid-state nanopores : fabrication and applications

   Författare :Shuangshuang Zeng; Zhen Zhang; Amit Meller; Uppsala universitet; []
   Nyckelord :solid-state nanopore; truncated-pyramidal nanopore; nanopore array; pore size reduction; individual addressability; microfluidics; translocation.; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Sammanfattning : Nanopores are of great interest in study of DNA sequencing, protein profiling and power generation. Among them, solid-state nanopores show obvious advantages over their biological counterparts in terms of high chemical stability and reusability as well as compatibility with the existing CMOS fabrication techniques. LÄS MER

5. 19. Magnesium Diboride (MgB2) and Ca-doped YBa2Cu3O7-? : Thin Films and Devices. Fabrication and Characterization

   Författare :Anayesu Malisa; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Ca-doped YBa2Cu3O7-?; MgB2; bicrystal; superconductor; nanobridge; thin film; Josephson effect; Josephson junction;

   Sammanfattning : Magnesium diboride (MgB2) is a superconductor with an exceptionally high transition temperature, Tc, of 39 K. This work describes deposition of high quality and superconducting films of MgB2 for electronic applications. Experiments on Ca-doped YBa2Cu3O7-? films and fabrication of bicrystal Josephson junctions are also described. LÄS MER

7. 20. Nanofabrication of Zone Plate Optics for Compact Soft X-Ray Microscopy

   Författare :Anders Holmberg; Hans Hertz; Christian David; KTH; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Physics; Fysik;

   Sammanfattning : This Thesis describes the development of the KTH/Stockholm nanofabrication process for diffractive soft x-ray optics. The effort is motivated by the need for and requirement of specially designed diffractive optics and test objects for compact x-ray microscopy as well as optics for other applications such as phase imaging. LÄS MER