Avancerad sökning

Visar resultat 21 - 22 av 22 avhandlingar som matchar ovanstående sökkriterier.

  1. 21. Metastable ScAlN and YAlN Thin Films Grown by Reactive Magnetron Sputter Epitaxy

    Författare :Agnė Žukauskaitė; Jens Birch; Lars Hultman; Michelle Moram; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : Metastable ScxAl1-xN and YxAl1-xN thin films were deposited in an ultra high vacuum system using reactive magnetron sputter epitaxy from elemental Al, Sc, and Y targets in Ar/N2 gas mixture. Their structural, electrical, optical, mechanical, and piezoelectrical properties were investigated by using the transmission electron microscopy, x-ray diffraction, spectroscopic ellipsometry, I-V and C-V measurements, nanoindentation, and two different techniques for piezoelectric characterization: piezoresponse force microscopy and double beam interferometry. LÄS MER

  3. 22. Metastable YAlN and ScAlN thin films : growth and characterization

    Författare :Agnė Žukauskaitė; Lars Hultman; Jens Birch; Anita Lloyd Spetz; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : ScxAl1-xN and YxAl1-xN thin films were deposited in a ultra high vacuum system using reactive magnetron co-sputtering from elemental Al, Sc and Y targets in Ar/N2. Their mechanical, electrical, optical, and piezoelectrical properties were investigated with the help of transmission electron microscopy, xray diffraction, ellipsometry, I-V and C-V measurements, and two different techniques for piezoelectric characterization: piezoresponse force microscopy and double beam interferometry. LÄS MER