Sökning: "Ling-guang Li"
Hittade 1 avhandling innehållade orden Ling-guang Li.
1. Fabrication and Characterization of Si-on-SiC Hybrid Substrates
Sammanfattning : In this thesis, we are making a new approach to fabricate silicon on insulator (SOI). By replacing the buried silicon dioxide and the silicon handling wafer with silicon carbide through hydrophilic wafer bonding, we have achieved silicon on crystalline silicon carbide for the first time and silicon on polycrystalline silicon carbide substrates at 150 mm wafer size. LÄS MER
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