Sökning: "Christian Lavoie"
Hittade 1 avhandling innehållade orden Christian Lavoie.
1. Interaction of Ni with SiGe for electrical contacts in CMOS technology
Sammanfattning : This thesis investigates the reactive formation of Ni mono-gernanosilicide, NiSi1-uGeu, for contact metallization of future CMOS devices where Si1-xGex can be present in the gate, source and drain of a MOSFET. Although the investigation has been pursued with a strong focus on materials aspects, issues related to process integration in MOSFETs both on conventional bulk Si and ultra-thin body SOI have been taken into consideration. LÄS MER
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