Sökning: "MTOS"

Hittade 2 avhandlingar innehållade ordet MTOS.

1. 1. Electrically active defects in metal-tunnel oxide-silicon (MTOS) devices

   Författare :Per Lundgren; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; tunneling; MTOS; PMA; MOS;

   Sammanfattning : .... LÄS MER

3. 2. Electrical Characterization of Metal-Oxide-Silicon Structures with Ultra Thin Oxide Layers

   Författare :Per Lundgren; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; tunneling; MTOS; oxide defects; MOS; PMA;

   Sammanfattning : Metal-oxide-semiconductor (MOS) structures with very thin (2 - 4 nm) oxide layers thermally grown on silicon have been electrically characterized regarding oxide and interface defects and concerning the direct tunnel current through the oxide. This thesis comprises eight papers which deal with the appearance of oxide charge during electrical stress (papers A, D, E), the beneficial effect on the defect density of low-temperature (up to 350 °C) post-metallization annealing (PMA) (paper A, B, C, G), and the effect of temperature and choice of metal for the tunnel current (paper F, H). LÄS MER