Sökning: "dry etching"

Visar resultat 1 - 5 av 26 avhandlingar innehållade orden dry etching.

  1. 1. Ion beam etching of InP based materials

    Författare :Carl-Fredrik Carlström; KTH; []
    Nyckelord :InP; dry etching; ion beam etching; RIBE; CAIBE; hydrocarbon chemistry; trimethylamine; As P exchange reaction; morphology; low damage; AFM; SCM; annealing;

    Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER

  3. 2. Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures

    Författare :Otto Zsebök; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; micromapping; MBE; dry etching; III-V semiconductor; processing; alternative precursor; SEM; photoluminescence; quantum wire; self-narrowing etching; wet chemical etching; MOVPE;

    Sammanfattning : .... LÄS MER

  4. 3. Two-Dimensional Photonic Crystals in InP-based Materials

    Författare :Mikaël Mulot; KTH; []
    Nyckelord :Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

    Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER

  5. 4. Top-down Fabrication Technologies for High Quality III-V Nanostructures

    Författare :Shagufta Naureen; Srinivasan Anand; Clivia M. Sotomayor Torres; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; III-V nanostructures; colloidal lithography; top-down fabrication; dry etching; quantum well; multilayer structures; nanowires; nanopillars; nanodisks; mono-layer etching; surface passivation; photoluminescence; carrier life time; total reflectivity; photonic crystals; nanomesh;

    Sammanfattning : III-V nanostructures have attracted substantial research effort due to their interesting physical properties and their applications in new generation of ultrafast and high efficiency nanoscale electronic and photonic components. The advances in nanofabrication methods including growth/synthesis have opened up new possibilities of realizing one dimensional (1D) nanostructures as building blocks of future nanoscale devices. LÄS MER

  7. 5. Design, Simulation and Characterization of Some Planar Lightwave Circuits

    Författare :Yaocheng Shi; Anand Srinivasan; Sailing He; Daniel Erni; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; planar lightwave circuit; waveguide; coupler; multimode interference; photonic crystal waveguide; de multiplexer; triplexer; polarization beam splitter; dry etching; carrier life time.; Photonics; Fotonik;

    Sammanfattning : Optical devices based on planar lightwave circuit (PLC) technology have the advantages of small size, high reliability, possibility for large scale production, and potential integration with electronics. These devices are widely employed in optical telecommunications, sensing, data storage, imaging, and signal processing. LÄS MER