Sökning: "Sukkaneste Tungasmita"

Hittade 2 avhandlingar innehållade orden Sukkaneste Tungasmita.

1. 1. Epitaxial aluminum nitride thin films on 6H-silicon carbide, grown by magnetron sputter deposition

   Författare :Sukkaneste Tungasmita; Linköpings universitet; []
   Nyckelord :;

   Sammanfattning : The research presented in this thesis is focused on epitaxial wurtzite-structure Aluminum Nitride (AlN) thin film synthesis, by ultra-high-vacuum (UHV) de magnetron sputter deposition, on Silicon Carbide (6H-SiC) substrates. The emphasis of the work has been put on controlling the growth and quality of the films to be able to use this material in electronic device applications. LÄS MER

3. 2. Growth of Wide-Band Gap AlN and (SiC)x(AlN)1-x Thin Films by Reactive Magnetron Sputter Deposition

   Författare :Sukkaneste Tungasmita; Gregory W. Auner; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The research presented in this thesis is focused on thin film synthesis of epitaxial wurtzite structure aluminum nitride (AlN) and related alloy, (SiC)x(AlN)1-x,by ultra-high-vacuum (UHV) reactive magnetron sputter deposition, on silicon carbide (6H-SiC) substrates. The emphasis of the work is on controlling the growth and quality of the films to be able to use the materials in electronic device applications. LÄS MER