Sökning: "heat abd tgernidtbanucs"

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  1. 1. Hydrogen diffusion and ion implantation in silicon carbide

    Författare :Martin Janson; KTH; []
    Nyckelord :heat abd tgernidtbanucs; electronics and electrical; materials science;

    Sammanfattning : Secondary ion mass spectrometry (SIMS) has been employed tostudy the spatial distributions resulting from mass transportby diffusion and ion implantation in single crystal siliconcarbide (SiC). By a systematic analysis of this data,fundamental processes that govern these phenomena have beenderived. LÄS MER