Sökning: "Yaroslav Koshka"

Hittade 1 avhandling innehållade orden Yaroslav Koshka.

1. 1. Chloride-based Silicon Carbide CVD

   Författare :Henrik Pedersen; Erik Janzén; Anne Henry; Yaroslav Koshka; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Chemistry; Kemi;

   Sammanfattning : Silicon carbide (SiC) is a promising material for high power and high frequency devices due to its wide bandgap, high break down field and high thermal conductivity. The most established technique for growth ofepitaxial layers of SiC is chemical vapor deposition (CVD) at around 1550 °C using silane, SiH4, and lighthydrocarbons e g propane, C3H8, or ethylene, C2H4, as precursors heavily diluted in hydrogen. LÄS MER