Sökning: "Optical metrology"

Visar resultat 1 - 5 av 24 avhandlingar innehållade orden Optical metrology.

  1. 1. Improved inspection and micrometrology of embedded structures in multi-layered ceramics : Development of optical coherence tomographic methods and tools

    Författare :Rong Su; Lars Mattsson; Peter Ekberg; Jerzy Pluciński; KTH; []
    Nyckelord :Metrology; Optical Coherence Tomography; Ceramics; Embedded Structure; Multilayer; Nondestructive Testing; Optical Inspection; Critical Dimension Measurement; Infrared Imaging; Scattering; Mie Calculation; Image Processing; Monte Carlo Simulation; 测量学, 光学相干断层扫描术,陶瓷,嵌入式结构,多层,无损检测,光学检测,关键尺寸测量,红外成像,散射,Mie计算,图像处理,Monte Carlo模拟; SRA - Production; SRA - Produktion;

    Sammanfattning : Roll-to-roll manufacturing of micro components based on advanced printing, structuring and lamination of ceramic tapes is rapidly progressing. This large-scale and cost-effective manufacturing process of ceramic micro devices is however prone to hide defects within the visually opaque tape stacks. LÄS MER

  2. 2. Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials

    Författare :Rong Su; Lars Mattsson; Hjalmer Granberg; KTH; []
    Nyckelord :metrology; optical coherence tomography; alumina ceramics; nondestructive testing; imaging through turbid media; light scattering; image processing; numerical approximation and analysis; Monte Carlo method;

    Sammanfattning : Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects.In this work, alumina ceramic samples are evaluated by optical coherence tomography (OCT) operating at 1. LÄS MER

  3. 3. Exploiting the Terahertz Spectrum with Silicon Micromachining : Waveguide Components, Systems and Metrology

    Författare :James Campion; Joachim Oberhammer; Umer Shah; Robert M. Weikle II; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Terahertz; Silicon Micromachining; Waveguide; Waveguide System; Metrology; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : The terahertz spectrum (300 GHz - 3 THz) represents the final frontier for modern electronic and optical systems, wherein few low-cost, volume-manufacturable solutions exist. THz frequencies are of great scientific and commercial interest, with applications as diverse as radio astronomy, sensing and imaging and wireless communications. LÄS MER

  4. 4. Epitaxial Graphene Technology for Quantum Metrology

    Författare :Thomas Yager; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; charge neutrality; optical microscopy; Epitaxial graphene; resistance metrology; silicon carbide; quantum Hall effect; electron transport; bilayer graphene;

    Sammanfattning : Graphene grown on silicon carbide by high-temperature annealing (SiC/G) is a strong contender in the race towards large-scale graphene electronics applications. The unique electronic properties of this system lead to a remarkably robust and accurate Hall resistance quantisation of 0. LÄS MER

  5. 5. Spatial and temporal metrology of intense attosecond pulses

    Författare :Helene Coudert-Alteirac; Atomfysik; []
    Nyckelord :Ultrafast optics; High-order harmonic generation; Filamentation; Attosecond; Femtosecond; Extreme ultraviolet; Wavefront measurement; Optical metrology; XUV optics; interferometry; Pump-probe; Fysicumarkivet A:2018:Coudert-Alteirac;

    Sammanfattning : Attosecond pulses are short enough to capture the electronic dynamics in atoms and molecules. The work presented in this thesis deals with the generation and optimization of attosecond extreme-ultraviolet (XUV) pulses. LÄS MER