Sökning: "Bernd Schultrich"

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1. 1. Sputtered Carbon Nitride Thin Films

   Författare :Niklas Hellgren; Bernd Schultrich; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The relation between the growth conditions and the film structure and properties of reactively magnetron sputtered carbon nitride CNx (0 ≤ x ≤ 0.6) thin films has been studied. The growth of CNx films has been studied when varying the process parameters, such as substrate temperature, N2 (partial) pressure and ion flux. LÄS MER