Sökning: "Roberto Sorrentino"

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  1. 1. Monocrystalline-Silicon Based RF MEMS Devices

    Författare :Mikael Sterner; Joachim Oberhammer; Roberto Sorrentino; KTH; []
    Nyckelord :RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

    Sammanfattning : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. LÄS MER