Sökning: "microelectromechanical system"
Visar resultat 1 - 5 av 10 avhandlingar innehållade orden microelectromechanical system.
1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems
Sammanfattning : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. LÄS MER
2. Monocrystalline-Silicon Based RF MEMS Devices
Sammanfattning : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. LÄS MER
3. Microsystem Interfaces for Space
Sammanfattning : Microsystem interfaces to the macroscopic surroundings and within the microsystems themselves are formidable challenges that this thesis makes an effort to overcome, specifically for enabling a spacecraft based entirely on microsystems. The NanoSpace-1 nanospacecraft is a full-fledged satellite design with mass below 10 kg. LÄS MER
4. Miniaturized Multifunctional System Architecture for Satellites and Robotics
Sammanfattning : This thesis describes and evaluates the design of nanospacecraft based on advanced multifunctional microsystems building blocks. These systems bring substantial improvements of the performance of nanosatellites and enable new space exploration, e.g. interplanetary science missions using minute space probes. LÄS MER
5. Novel RF MEMS Switch and Packaging Concepts
Sammanfattning : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. LÄS MER