Sökning: "wafer"
Visar resultat 16 - 20 av 138 avhandlingar innehållade ordet wafer.
16. Applications of Artificial Microcavities in Wafer Bonded Silicon
Sammanfattning : A novel sensor structure has been investigated and extensively studied. The device can be used as a pressure sensor, a voltage measuring device and as an optical modulator. The sensor was made using thermal bonding and micromachining techniques. LÄS MER
17. MEMS-based electrochemical gas sensors and wafer-level methods
Sammanfattning : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. LÄS MER
18. Wafer-level 3-D CMOS Integration of Very-large-scale Silicon Micromirror Arrays and Room-temperature Wafer-level Packaging
Sammanfattning : This thesis describes the development of wafer-level fabrication and packaging methods for micro-electromechanical (MEMS) devices, based on wafer-bonding.The first part of the thesis is addressing the development of a wafer-level technology that allows the use of high performance materials, such as monocrystalline silicon, for MEMS devices that are closely integrated on top of sensitive integrated circuits substrates. LÄS MER
19. Processing technologies for long-wavelength vertical-cavity lasers
Sammanfattning : Vertical-cavity surface-emitting lasers (VCSELs) areattractive as potential inexpensive high-performance emittersfor fibre-optical communication systems. Their surface-normalemission together with the small dimensions are beneficial forlow-cost fabrication since it allows on-wafer testing,simplified packaging and effective fibre-coupling. LÄS MER
20. The Buried Oxide of Silicon on Insulator Materials
Sammanfattning : The buried oxide of silicon on insulator (SOI) wafers plays an important role in the operation of electronic devices made on such materials. The presence of defects in the buried oxide can seriously degrade the performance of a circuit. LÄS MER