Sökning: "ultra shallow thermal donors"

Hittade 1 avhandling innehållade orden ultra shallow thermal donors.

1. 1. Capacitance Spectroscopy of Point Defects in Silicon and Silicon Carbide

   Författare :Denny Åberg; KTH; []
   Nyckelord :capacitance spectrocopy; deep levels; deep level transient spectroscopy; thermal donors; thermal double donors; ultra shallow thermal donors; chemical kinetics; silicon carbide; ion implantation; implantation induced defects; implantation induced pas;

   Sammanfattning : .... LÄS MER