Sökning: "silicon oxynitride"

Visar resultat 1 - 5 av 8 avhandlingar innehållade orden silicon oxynitride.

1. 1. Deposition of high quality thin dielectrics on silicon

   Författare :Lars-Åke Ragnarsson; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; oxynitride; metal-oxide-semiconductor capacitors; RPECVD; silicon dioxide; interfaces; si-SiO2; remote plasma-enhanced CVD; ONO; C-V; nitrided interfaces; SiO2; deposited dielectrics;

   Sammanfattning : .... LÄS MER

3. 2. Silicon Oxynitride Thin Films Grown by Reactive HiPIMS

   Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Jón Tómas Guðmundsson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. LÄS MER

4. 3. On the preparation and structure of O-sialons

   Författare :Jörgen Sjöberg; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; silicon oxynitride; Sialon; ammonia; crystal structure; nitridation; extended X-ray absorption fine structure; nuclear magnetic resonance; neutron diffraction;

   Sammanfattning : .... LÄS MER

5. 4. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

   Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Arutiun P. Ehiasarian; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. LÄS MER

7. 5. Formation of silicon nitride based materials by nitridation and sintering

   Författare :Alena Ashkin; Luleå tekniska universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materialteknik; Engineering Materials;

   Sammanfattning : Todays demands on silicon nitride based materials for structural applications focus on microstructures rendering high strengths and reliability at reasonable costs. This work was mainly aimed at production of sialons for these types of applications by nitridation with subsequent sintering. LÄS MER