Sökning: "plasma deposition"

Visar resultat 21 - 25 av 191 avhandlingar innehållade orden plasma deposition.

  1. 21. Deposition of Al-doped ZnO films by high power impulse magnetron sputtering

    Författare :Martin Mickan; David Horwat; Ulf Helmersson; Aline Rougier; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : Transparent conducting oxides (TCOs) are an important class of materials with many applications such as low emissivity coatings, or transparent electrodes for photovoltaics and flat panel displays. Among the possible TCO materials, Al-doped ZnO (AZO) is studied due to its relatively low cost and abundance of the raw materials. LÄS MER

  3. 22. Controlling the growth of nanoparticles produced in a high power pulsed plasma

    Författare :Rickard Gunnarsson; Ulf Helmersson; Nils Brenning; Holger Kersten; Linköpings universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : Nanotechnology can profoundly benefit our health, environment and everyday life. In order to make this a reality, both technological and theoretical advancements of the nanomaterial synthesis methods are needed. LÄS MER

  4. 23. Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux

    Författare :Daniel Magnfält; Ulf Helmersson; Fridrik Magnus; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : This thesis presents fundamental mechanisms of nucleation and early growth of and stress generation in thin polycrystalline metal films deposited using pulsed energetic deposition fluxes. The effects of a pulsed deposition flux and energetic bombardment on film nucleation was investigated using in situ stress measurements and in situ ellipsometry to determine the film thickness at which the films become continuous. LÄS MER

  5. 24. Cathodic Arc Synthesis of Ti-Si-C-N Thin Films : Plasma Analysis and Microstructure Formation

    Författare :Anders Eriksson; Johanna Rosén; Lars Hultman; Arutiun Ehiasarian; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : This Thesis explores the arc deposition process and films of Ti-Si-C-N, inspired by the two ternary systems Ti-Si-N and Ti-C-N, both successfully applied as corrosion and wear resistant films. The correlation between cathode, plasma, and film properties are studied for a comprehensive view on film formation. LÄS MER

  7. 25. Fabrication of Low-Dimensional Structures in III-V Semiconductors

    Författare :Ivan Maximov; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; III-V semiconductors; plasma; etching; aerosol; lithography; quantum dots; quantum well wires; quantum point contact; damage; luminescence; Fysicumarkivet A:1997:Maximov; Halvledarfysik; Semiconductory physics;

    Sammanfattning : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. LÄS MER