Sökning: "planarization"

Visar resultat 1 - 5 av 6 avhandlingar innehållade ordet planarization.

1. 1. Towards Carbon Nanotube-based off-Chip Interconnects

   Författare :Teng Wang; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; densification; through silicon via TSV ; transfer; carbon nanotube CNT ; planarization; interconnect;

   Sammanfattning : .... LÄS MER

3. 2. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing

   Författare :Markus Forsberg; Jörgen Olsson; Jyrki Molarius; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; chemical mechanical polishing; chemical mechanical planarization; silicon; silicon dioxide; front end; shallow trench isolation; deep trench isolation; bipolar transistor; BiCMOS; wafer bonding; Elektronik; Electronics; Elektronik;

   Sammanfattning : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. LÄS MER

4. 3. Probing the Effects of Conformation on the Photophysics of Conjugated Porphyrin Oligomers

   Författare :Melina Gilbert Gatty; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; electron transfer; conformational analysis; conjugated porphyrin oligomers;

   Sammanfattning : Controlling the conformational heterogeneity of molecular systems is fundamental to envisage future applications of these systems, such as in solar cells or molecular devices to name a few. The work presented in this Thesis investigates the effects of conformational flexibility on the photophysical properties of a series of conjugated porphyrin oligomers Pn (n = 1-4, 6, 8). LÄS MER

5. 4. Fabrication of Group IV Semiconductors on Insulator for Monolithic 3D Integration

   Författare :Ali Asadollahi; Mikael Östling; Paul R. Berger; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; monolithic three dimensional M3D integration; strained germanium on insulator sGeOI pMOSFETs; silicon silicon-germanium on insulator sSOI sSiGeOI nMOSFETs; Si0.5Ge0.5 strain-relaxed buffer SRB ; direct bonding; chemical mechanical polishing CMP ; compressively strained GeOI; tensile strained Si0.5Ge0.5OI;

   Sammanfattning : The conventional 2D geometrical scaling of transistors is now facing many challenges in order to continue the performance enhancement while decreasing power consumption. The decrease in the device power consumption is related to the scaling of the power supply voltage (Vdd) and interconnects wiring length. LÄS MER

7. 5. Waste Heat Driven Membrane Distillation for Industrial Wastewater Treatment

   Författare :Imtisal-e- Noor; Andrew R. Martin; Olli Dahl; Mikel Duke; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Membrane Distillation; Experimental investigations; Techno-economic; Wastewater; Flue gas condensate; Waste heat; District heating; Nano-electronics; Cogeneration; Sustainable development; Energy Technology; Energiteknik; Chemical Engineering; Kemiteknik;

   Sammanfattning : The European Union has placed a high priority on reaching the goals described in the 2030 Agenda for Sustainable Development. This aim has provided added momentum to member-state environmental regulatory authorities to further tighten the discharge limits of industrial wastewater. LÄS MER