Sökning: "photoresist"

Visar resultat 1 - 5 av 14 avhandlingar innehållade ordet photoresist.

  1. 1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems

    Författare :Niklaus Frank; KTH; []
    Nyckelord :adhesive; wafer; bonding; low temperature; CMOS compatible; selective; local; polymer; thermoplastic; thermosetting; intermediate layer; coating; benzocyclobutene; BCB; photoresist; epoxy; glue; wafer-level; sacrificial; etching; grinding; etch-stop;

    Sammanfattning : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. LÄS MER

  3. 2. Polymer-Based Micromachining for Scalable and Cost-Effective Fabrication of Gap Waveguide Devices Beyond 100 GHz

    Författare :Sadia Farjana; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Dry film photoresist; Terahertz frequency; Injection molding; MEMS; mmWave; Gap waveguide; Antenna; Waveguide; Polymer microfabrication;

    Sammanfattning : The terahertz (THz) frequency bands have gained attention over the past few years due to the growing number of applications in fields like communication, healthcare, imaging, and spectroscopy. Above 100 GHz transmission line losses become dominating, and waveguides are typically used for transmission. LÄS MER

  4. 3. Polymer-Based Low-Cost Micromachining of Gap Waveguide Components

    Författare :Sadia Farjana; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; mmWave; Polymer microfabrication; sub-mmWave; Dry film photoresist; MEMS; Gap waveguide; Antenna; Waveguide.; Injection molding;

    Sammanfattning : The millimeter-wave (mmWave) and sub-millimeter-wave (sub-mmWave) frequency bands have gained significant attention over the past few years due to the growth of commercial wireless applications. As the operating frequency approaches these higher frequencies, the dimensions of the waveguide-based components continue to decrease. LÄS MER

  5. 4. Ramp Josephson junctions based on NdBa2Cu3O7-δ electrodes and PrBa2Cu3O7-δ barriers

    Författare :Mikael Sjöstrand; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; PBCO; high temperature; superconducting device; ramp Josephson junction; NBCO; pulsed laser deposition; thin film;

    Sammanfattning : We report on smooth high quality c-axis orientedNdBa2Cu3O7-δ (NBCO) superconducting thin filmsgrown on (001) SrTiO3 substrates using pulsed laser deposition.The transition temperature of these NBCO films was around 89.5 Kand the root-mean-square (RMS) surface roughness was 0.75 nm for150 nm thick films. LÄS MER

  7. 5. Micromachined epitaxial colossal mognetoresistors for uncooled infrared bolometer

    Författare :Joo-Hyung Kim; Alexander M. Grishin; Yael Nemirosky; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; La0.67 Sr; Ca 0.33MnO3 LSCMO ; La0.67Sr0.33MnO3 LSMO ; Electrophysics; Elektrofysik;

    Sammanfattning : High quality perovskite manganites, La1-xAxMnO3 (A = Ca, Sr, Ba) are very attractive materials due to their great application potential for magnetic memory, uncooled infrared (IR) microbolometer and spintronics devices. This thesis presents studies of the growth and material characterization (including structural, electrical, magnetic and noise) of epitaxial manganite films on Si and GaAs. LÄS MER