Sökning: "nm-resolution"

Visar resultat 1 - 5 av 13 avhandlingar innehållade ordet nm-resolution.

1. 1. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

   Författare :Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

   Sammanfattning : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. LÄS MER

3. 2. Ultra precision metrology : the key for mask lithography and manufacturing of high definition displays

   Författare :Peter Ekberg; Lars Mattsson; Torgny Carlsson; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision metrology; LCD-display; OLED-display; nm-resolution; large area; random phase measurement; acousto-optic deflection; scanning; 2D measurement; mask; CCD; CMOS; image processing; edge detection; TECHNOLOGY; TEKNIKVETENSKAP; Manufacturing engineering; Produktionsteknik;

   Sammanfattning : Metrology is the science of measurement. It is also a prerequisite for maintaining a high quality in all manufacturing processes. In this thesis we will present the demands and solutions for ultra-precision metrology in the manufacturing of lithography masks for the TV-display industry. LÄS MER

4. 3. Growth, structure and properties of ternary transition metal nitride thin films prepared by reactive magnetron sputtering

   Författare :Torbjörn Joelsson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Early transition metal nitrides have found an extensive use in a range of applications. Even though the use is wide there are still large fields to explore. The work in this thesis has been directed towards increasing the fundamental understanding of the synthesis, characterization, and properties for some technologically relevant nitrides. LÄS MER

5. 4. High-Aspect Ratio Nanofabrication for Hard X-Ray Zone Plates

   Författare :Karolis Parfeniukas; Ulrich Vogt; Hans Hertz; Anne Sakdinawat; KTH; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; nanofabrication; x-ray optics; zone plate; tungsten; silicon; reactive ion etching; metal-assisted chemical etching; Ronchi test; Fysik; Physics;

   Sammanfattning : Hard x-ray nanoimaging enables structural investigations of new materials for many applications. For high-resolution experiments, zone plate x-ray optics are commonly chosen.Two methods of zone plate nanofabrication are presented in this thesis.Zone plates are circular diffraction gratings with radially decreasing grating period. LÄS MER

7. 5. Laboratory soft x-ray microscopy and tomography

   Författare :Michael Bertilson; Hans Hertz; Gerd Schneider; KTH; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; Microscopy; X-ray optics; Diffractive optics; Zone plates; X-ray microscopy; Soft X-ray physics; Tomography; Optics; Optik; Physics; Fysik;

   Sammanfattning : Soft x-ray microscopy in the water-window (λ = 2.28 nm – 4.36 nm) is based on zone-plate optics and allows high-resolution imaging of, e.g. LÄS MER