Sökning: "nanoimprint lithography NIL"

Hittade 4 avhandlingar innehållade orden nanoimprint lithography NIL.

  1. 1. Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers

    Författare :Marc Beck; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; electrochemistry; interdigitated array; anti-adhesion; anti-sticking; stamp; mold; monolayer deposition; Fysik; post-imprint processes; Physics; transducer; nanoimprint lithography; sensor; Fysicumarkivet A:2003:Beck;

    Sammanfattning : This thesis gives an overview about the current status of nanoimprint lithography, a relatively new nanofabrication tool. The technology is capable for parallel mass production of nm-structured features having a resolution below 10 nm and is usable with high throughput on full wafer scale. LÄS MER

  3. 2. Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences

    Författare :Patrick Carlberg; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Mikroelektronik; Microelectronics; Teknik; ballistic; Technological sciences; Fysik; Physics; nanowire; TBJ; cantilever; IDA electrode; sensors; life-science; lift-off; patterning media; anti-sticking; mold; stamp; process development; thermal imprint; nanoimprint lithography; Biotechnology; Bioteknik; nanotechnology; polymer; nanostructure;

    Sammanfattning : This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography (NIL), a relatively new nanofabrication tool capable of high resolution and high throughput. Surface structure creation with NIL is based on mechanical deformation of the patterning material. LÄS MER

  4. 3. Nanoimprint Lithography Based Nanoelectromechanical Device Fabrication

    Författare :Gang Luo; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : This thesis presents studies concerning the development of nanoimprint lithography technology, nanoimprint lithography-based nanofabrication, as well as the production of NEMS devices and their characterization. It can be divided into the following parts: The first part introduces different NIL stamp fabricating methods and processes. LÄS MER

  5. 4. Thiol-ene Nanostructuring

    Författare :Reza Zandi Shafagh; Klas Tommy Haraldsson; Wouter van der Wijngaart; Niels Bent Larsen; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Nanostructuring; thiol-ene; OSTE; electron beam lithography EBL ; reaction injection molding RIM ; nanoimprint lithography NIL ; BioNEMS; QCM; digital bioassay; protein patterning; Lab-on-a-chip; polymer;

    Sammanfattning : Improving the health and well-being of humankind does not only constitutepart of our moral codes, but is also enlisted as the number three goal ofthe 2030 agenda for sustainable development set by the UN. Fulfilling suchobjective in the regions of resource-poor settings or for age groups with morevulnerability to infectious agents demands immediate actions. LÄS MER