Sökning: "micromirror"
Hittade 4 avhandlingar innehållade ordet micromirror.
1. Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
Sammanfattning : Micromirror-based maskless lithography has recently received attention as an attractive candidate to tackle challenges associated with the continued de-vice scaling in the semiconductor industry. The micromirrors work by diffrac-tion and the requirements on planarity are very tough, e.g. peak-to-valley dif-ferences of a few nanometers. LÄS MER
2. Wafer-level 3-D CMOS Integration of Very-large-scale Silicon Micromirror Arrays and Room-temperature Wafer-level Packaging
Sammanfattning : This thesis describes the development of wafer-level fabrication and packaging methods for micro-electromechanical (MEMS) devices, based on wafer-bonding.The first part of the thesis is addressing the development of a wafer-level technology that allows the use of high performance materials, such as monocrystalline silicon, for MEMS devices that are closely integrated on top of sensitive integrated circuits substrates. LÄS MER
3. Assembly of microsystems for optical and fluidic applications
Sammanfattning : This thesis addresses assembly issues encountered in optical and fluidic microsystem applications. In optics, the first subject concerns the active alignment of components in optical fibersystems. LÄS MER
4. Microfabrication and Integration Using Sub-Picosecond Laser Pulses and Magnetic Assembly
Sammanfattning : Microfabricated devices and systems have many exciting applications such as accelerometers for triggering the launching of airbags in cars, gyroscopes for sensing the rotations of mobile phones, and micromirror arrays for controlling light reflection in digital light projectors. These devices are currently produced using semiconductor manufacturing techniques, which are suitable for large volumes of mostly planar structures. LÄS MER