Sökning: "microlithography"

Hittade 2 avhandlingar innehållade ordet microlithography.

  1. 1. Partially Coherent Laser Radiation - Modeling and Application to Optical Microlithography

    Författare :Christer Rydberg; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; microlithography; coherence; temporal speckle; partial coherence; optical propagation; number of degrees of freedom; dynamic speckle;

    Sammanfattning : This work deals with a type of light that has properties somewhere between blackbody radiation and conventional laser light; such light is referred to as partially coherent. One example is the radiation from the pulsed excimer laser, which is used in the manufacturing of most of the worlds integrated circuits. LÄS MER

  3. 2. Assembly of microsystems for optical and fluidic applications

    Författare :Sjoerd Haasl; Göran Stemme; Richard Syms; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Applied mechanics; microsystem technology; micromachining; assembly; active alignment; BCB; Teknisk mekanik; Engineering mechanics; Teknisk mekanik;

    Sammanfattning : This thesis addresses assembly issues encountered in optical and fluidic microsystem applications. In optics, the first subject concerns the active alignment of components in optical fibersystems. LÄS MER