Sökning: "microelectromechanical system"

Visar resultat 1 - 5 av 10 avhandlingar innehållade orden microelectromechanical system.

  1. 1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems

    Författare :Niklaus Frank; KTH; []
    Nyckelord :adhesive; wafer; bonding; low temperature; CMOS compatible; selective; local; polymer; thermoplastic; thermosetting; intermediate layer; coating; benzocyclobutene; BCB; photoresist; epoxy; glue; wafer-level; sacrificial; etching; grinding; etch-stop;

    Sammanfattning : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. LÄS MER

  3. 2. Monocrystalline-Silicon Based RF MEMS Devices

    Författare :Mikael Sterner; Joachim Oberhammer; Roberto Sorrentino; KTH; []
    Nyckelord :RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

    Sammanfattning : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. LÄS MER

  4. 3. Microsystem Interfaces for Space

    Författare :Hugo Nguyen; Greger Thornell; Johan Köhler; Staffan Greek; Uppsala universitet; []
    Nyckelord :Engineering physics; microelectromechanical system; interface; microfluidics; nanosatellite; space; microsystems; filter; valve; MST; MEMS; Teknisk fysik;

    Sammanfattning : Microsystem interfaces to the macroscopic surroundings and within the microsystems themselves are formidable challenges that this thesis makes an effort to overcome, specifically for enabling a spacecraft based entirely on microsystems. The NanoSpace-1 nanospacecraft is a full-fledged satellite design with mass below 10 kg. LÄS MER

  5. 4. Miniaturized Multifunctional System Architecture for Satellites and Robotics

    Författare :Fredrik Bruhn; Jan-Åke Schweitz; Lars Stenmark; Johan Köhler; Thomas George; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Space technology; Multifunctional design; Spacecraft; Robotics; Microengineering; MEMS; Exploration; Distributed intelligence; Mission Design; Rymdteknik; Space engineering; Rymdteknik;

    Sammanfattning : This thesis describes and evaluates the design of nanospacecraft based on advanced multifunctional microsystems building blocks. These systems bring substantial improvements of the performance of nanosatellites and enable new space exploration, e.g. interplanetary science missions using minute space probes. LÄS MER

  7. 5. Novel RF MEMS Switch and Packaging Concepts

    Författare :Joachim Oberhammer; KTH; []
    Nyckelord :0-level packaging; adhesive bonding; BCB; benzocyclobutene; bond strength; contact printing; film actuator; glass lid encapsulation; glass lid packaging; helium leak test; hermetic packaging; hermeticity; high isolation switch; low stress silicon nitride; low volt; TECHNOLOGY; TEKNIKVETENSKAP;

    Sammanfattning : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. LÄS MER