Sökning: "micro nano-fabrication"

Visar resultat 1 - 5 av 9 avhandlingar innehållade orden micro nano-fabrication.

1. 1. Micro-Flow Reactors for Kinetic Studies of Model Catalysts made by Electron-Beam Lithography

   Författare :Stefan Johansson; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; bistability; catalysis; nano-fabrication; supported model catalyst; CO oxidation; electron-beam lithography EBL ; micro-reactor;

   Sammanfattning : The main objective of this work is to explore the potential of using electron beam lithography (EBL) to prepare well defined supported model catalysts, which can be used for catalytic research. The work has involved three major areas (i) EBL-fabrication of catalysts, (ii) design of a micro-flow reactor for catalytic evaluation, and (iii) problem oriented research using EBL-fabricated model catalysts. LÄS MER

3. 2. Fabrication and Characterization of Aluminum Single Electron Transistors for Scanning Probes

   Författare :Henrik Brenning; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; radio frequency single electron transistor; scanning probe; charging energy; nano fabrication; noise; scanning SET; SET; cantilever; AFM; RC-product; micro mechanics;

   Sammanfattning : The main objective of the work presented in this thesis was to fabricatescanning single electron transistor probes that operate at pumped liquid heliumtemperatures. This required single electron transistors (SETs) with low resistance (R_) and relatively high charging energy (E_C), and the technology tointegrate SETs onto probes. LÄS MER

4. 3. Properties of small Bi2Sr2CaCu2O8 intrinsic Josephson junctions: confinement, flux-flow and resonant phenomena

   Författare :Sven-Olof Katterwe; Vladimir M. Krasnov; Alexey Ustinov; Stockholms universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; high-temperature superconductivity; intrinsic Josephson junctions; tunneling; fluxons; flux-flow oscillator; THz-emission; cavity resonances; polaritons; micro nano-fabrication; fysik; Physics;

   Sammanfattning : In this thesis, intrinsic Josephson junctions, naturally formed in the strongly anisotropic high-temperature superconductor Bi2Sr2CaCu2O8 (Bi-2212), are studied experimentally. For this purpose, small mesa structures are fabricated on the surface of single crystals using micro- and nano-fabrication tools, focused ion beam is used to reduce the area of the mesa-structures down to ≈ 1 × 1 μm2. LÄS MER

5. 4. High-frequency phenomena in small Bi2Sr2CaCu2O8+x intrinsic Josephson junctions

   Författare :Holger Motzkau; Vladimir M. Krasnov; Reinhold Kleiner; Stockholms universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; high-temperature superconductivity; Bi-2212; cuprates; intrinsic Josephson junctions; intrinsic tunneling; fluxons; flux-flow oscillator; THz-emission; cavity resonances; polaritons; electrical doping; micro nano-fabrication; fysik; Physics;

   Sammanfattning : In this thesis, the tunneling between individual atomic layers in structures of Bi2Sr2CaCu2O8+x based high-temperature superconductors are experimentally studied employing the intrinsic Josephson effect. A special attention is paid to the fabrication of small mesa structures using micro and nanofabrication techniques. LÄS MER

7. 5. Integration and Fabrication Techniques for 3D Micro- and Nanodevices

   Författare :Andreas C. Fischer; Frank Niklaus; Karl F. Böhringer; KTH; []
   Nyckelord :Microelectromechanical systems; MEMS; Nanoelectromechanical systems; NEMS; silicon; wafer-level; chip-level; through silicon via; TSV; packaging; 3D packaging; vacuum packaging; liquid encapsulation; integration; heterogeneous integration; wafer bonding; microactuators; shape memory alloy; SMA; wire bonding; magnetic assembly; self-assembly; 3D; 3D printing; focused ion beam; FIB;

   Sammanfattning : The development of micro and nano-electromechanical systems (MEMS and NEMS) with entirely new or improved functionalities is typically based on novel or improved designs, materials and fabrication methods. However, today’s micro- and nano-fabrication is restrained by manufacturing paradigms that have been established by the integrated circuit (IC) industry over the past few decades. LÄS MER