Sökning: "maskless lithography"
Hittade 1 avhandling innehållade orden maskless lithography.
1. Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
Sammanfattning : Micromirror-based maskless lithography has recently received attention as an attractive candidate to tackle challenges associated with the continued de-vice scaling in the semiconductor industry. The micromirrors work by diffrac-tion and the requirements on planarity are very tough, e.g. peak-to-valley dif-ferences of a few nanometers. LÄS MER
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