Sökning: "magnetron sputter-deposition"
Visar resultat 6 - 10 av 25 avhandlingar innehållade orden magnetron sputter-deposition.
6. Synthesis and Characterization of Amorphous Carbide-based Thin Films
Sammanfattning : In this thesis, research on synthesis, structure and characterization of amorphous carbide-based thin films is presented. Crystalline and nanocomposite carbide films can exhibit properties such as high electrical conductivity, high hardness and low friction and wear. LÄS MER
7. Photocatalytic TiO2 thin films for air cleaning : Effect of facet orientation, chemical functionalization, and reaction conditions
Sammanfattning : Poor indoor air quality is a source of adverse health effects. TiO2 coatings deposited on well-illuminated surfaces, such as window panes, can be used to fully mineralize indoor air pollutants by photocatalysis. LÄS MER
8. Sputter Deposition, Mechanical Properties, and Thermal Stability of Nitride Based Superlattices
Sammanfattning : Investigations concerning deposition, mechanical properties and thermal stability of nitride-based superlattice films have been performed. X-ray diffraction and transmission electron microscopy techniques were adopted for microstructural characterization, while nanoindentation hardness and abrasive wear resistance measurements were utilized for evaluation of mechanical properties. LÄS MER
9. Epitaxial aluminum nitride thin films on 6H-silicon carbide, grown by magnetron sputter deposition
Sammanfattning : The research presented in this thesis is focused on epitaxial wurtzite-structure Aluminum Nitride (AlN) thin film synthesis, by ultra-high-vacuum (UHV) de magnetron sputter deposition, on Silicon Carbide (6H-SiC) substrates. The emphasis of the work has been put on controlling the growth and quality of the films to be able to use this material in electronic device applications. LÄS MER
10. Growth of Wide-Band Gap AlN and (SiC)x(AlN)1-x Thin Films by Reactive Magnetron Sputter Deposition
Sammanfattning : The research presented in this thesis is focused on thin film synthesis of epitaxial wurtzite structure aluminum nitride (AlN) and related alloy, (SiC)x(AlN)1-x,by ultra-high-vacuum (UHV) reactive magnetron sputter deposition, on silicon carbide (6H-SiC) substrates. The emphasis of the work is on controlling the growth and quality of the films to be able to use the materials in electronic device applications. LÄS MER