Sökning: "magnetron co-sputtering"
Visar resultat 1 - 5 av 15 avhandlingar innehållade orden magnetron co-sputtering.
1. Growth and Characterization of Nb3Al Thin Films for Low-Noise Terahertz Electronics
Sammanfattning : Demand on ultimately sensitive heterodyne receivers for, e.g., radio astronomy and environmental science instrumentation, has driven large research activities on novel materials and devices for extending the frequency range into the THz domain. LÄS MER
2. Magnetism in Band Gap Engineered Sputtered MgxZn(1-x)O Thin Films
Sammanfattning : This dissertation presents a comprehensive study of the intrinsic room temperature ferromagnetism, RTFM, in technologically important thin films of ZnO, MgO, Mg@ZnO, the so-called d0–magnets that do not contain any intrinsic magnetic elements. We also present the first report on magnetism in Mn doped MgO films fabricated by dc magnetron sputtering. LÄS MER
3. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation
Sammanfattning : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. LÄS MER
4. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering
Sammanfattning : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. LÄS MER
5. Magnetron Sputtering of Nanocomposite Carbide Coatings for Electrical Contacts
Sammanfattning : Today’s electronic society relies on the functionality of electrical contacts. To achieve good contact properties, surface coatings are normally applied. Such coatings should ideally fulfill a combination of different properties, like high electrical conductivity, high corrosion resistance, high wear resistance and low cost. LÄS MER