Sökning: "low stress silicon nitride"
Visar resultat 1 - 5 av 8 avhandlingar innehållade orden low stress silicon nitride.
1. Novel RF MEMS Switch and Packaging Concepts
Sammanfattning : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. LÄS MER
2. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering
Sammanfattning : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. LÄS MER
3. Extreme Implementations of Wide-Bandgap Semiconductors in Power Electronics
Sammanfattning : Wide-bandgap (WBG) semiconductor materials such as silicon carbide (SiC) and gallium-nitride (GaN) allow higher voltage ratings, lower on-state voltage drops, higher switching frequencies, and higher maximum temperatures. All these advantages make them an attractive choice when high-power density and high-efficiency converters are targeted. LÄS MER
4. Physics of palladium metal-oxide-semiconductor devices
Sammanfattning : This thesis Palladium gate metal-oxide-semiconductor (PdMOS) devices are used as hydrogen sensors. It is shown that the sensitivity is only partly due to the change of the effective work function of the Pd gate on hydrogen adsorption. Sodium ion drift experiments have shown that hydrogen-sodium interactions occur in PdMOS devices. LÄS MER
5. Diffusion bonding of structural ceramics to superalloys by HIP
Sammanfattning : Diffusion bonding of structural ceramics to superalloys has been investigated. Emphasis was placed on methods resulting in joints durable at elevated temperatures (500 - 700ºC) between these two classes of high - temperature materials. LÄS MER