Sökning: "isotropic etching"

Hittade 4 avhandlingar innehållade orden isotropic etching.

1. 1. Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography

   Författare :Martin Bring; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; isotropic etching; LOCOS; micromirror; maskless lithography; chevron notch; low temperature transfer bonding; fracture toughness;

   Sammanfattning : Micromirror-based maskless lithography has recently received attention as an attractive candidate to tackle challenges associated with the continued de-vice scaling in the semiconductor industry. The micromirrors work by diffrac-tion and the requirements on planarity are very tough, e.g. peak-to-valley dif-ferences of a few nanometers. LÄS MER

3. 2. Prediction and Design of Self-Assembling Systems with Isotropic Potentials

   Författare :Oskar Lindgren; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : With technological advancement comes a growing interest in complex structures on the nano-scale. We as consumers desire new materials with interesting structural properties and smaller electronic components at a low price. Self-assembly is an easily scalable alternative to conventional manufacturing. LÄS MER

4. 3. Valve-less diffuser micropumps

   Författare :Anders Olsson; KTH; []
   Nyckelord :;

   Sammanfattning : Today there is growing interest in research on microfluidicsystems, e.g., for chemical analysis systems and microdosagesystems. One of the basic components in microfluidic systems ismicropumps. LÄS MER

5. 4. Diamond Based Electronics and Valleytronics : An experimental study

   Författare :Kiran Kumar Kovi; Jan Isberg; Shin-ichi Shikata; Uppsala universitet; []
   Nyckelord :Engineering Science with specialization in Science of Electricity; Teknisk fysik med inriktning mot elektricitetslära;

   Sammanfattning : Diamond is a promising semiconductor material for high power, high voltage, high temperature and high frequency applications due to its remarkable material properties: it has the highest thermal conductivity, it is the hardest material, chemically inert, radiation hard and has the widest transparency in the electromagnetic spectrum. It also exhibits excellent electrical properties like high breakdown field, high mobilities and a wide bandgap. LÄS MER