Sökning: "film thickness measurement"

Visar resultat 6 - 10 av 26 avhandlingar innehållade orden film thickness measurement.

1. 6. Advanced MEMS Pressure Sensors Operating in Fluids

   Författare :Emil Anderås; Ventsislav Yantchev; Ilia Katardjiev; Jörgen Olsson; Enrico Verona; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; pressure sensor; piezoresistance; nanofilms; AlN; microacoustic; Lamb wave; thin film; resonator; sensitivity; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Sammanfattning : Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors.In this thesis two different pressure sensor techniques are studied. LÄS MER

3. 7. Multimethod aerodynamic research of engine-realistic turbine rear structures

   Författare :Valentin Vikhorev; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; particle image velocimetry; vane lean; pressure taps; enginerealistic; engine-mount recess; European Union EU ; hot-wire anemometry; outlet guide vanes; oil-film visualization; multi-hole probe; turbine exhaust case; bump; turbine rear frame; computational fluid dynamics.; Clean Sky 2; experimental multimethod approach; Horizon 2020; EATEEM; turbine rear structure; low-pressure turbine;

   Sammanfattning : Despite the significant advancements in aircraft engine technology over the past years, the aerodynamics of engine-realistic turbine rear structures (TRS) remain largely unexplored. The TRS, a structural and aerodynamic component situated downstream of the low-pressure turbine (LPT), plays a pivotal role in engine aerodynamic performance, deswirling the LPT flow to maximize the engine thrust. LÄS MER

4. 8. VO2-based Thermochromic and Nanothermochromic Materials for Energy-Efficient Windows : Computational and Experimental Studies

   Författare :Shuyi Li; Claes-Göran Granqvist; Gunnar Niklasson; Ivan Parkin; Uppsala universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; VO2; thermochromism; nanothermochromics; energy efficient windows; optical modeling; effective medium theory; thin film characterization; doping;

   Sammanfattning : VO2-based films are thermochromic and exhibit high or low infrared transmittance when the temperature is below or above a critical temperature. The thermochromic switching is passive and reversible, and therefore VO2 based films are promising for energy-efficient window appli­cations. LÄS MER

5. 9. Epitaxial aluminum nitride thin films on 6H-silicon carbide, grown by magnetron sputter deposition

   Författare :Sukkaneste Tungasmita; Linköpings universitet; []
   Nyckelord :;

   Sammanfattning : The research presented in this thesis is focused on epitaxial wurtzite-structure Aluminum Nitride (AlN) thin film synthesis, by ultra-high-vacuum (UHV) de magnetron sputter deposition, on Silicon Carbide (6H-SiC) substrates. The emphasis of the work has been put on controlling the growth and quality of the films to be able to use this material in electronic device applications. LÄS MER

7. 10. Investigation of surface and interface phenomena in silicon and silicon dioxide systems

   Författare :Yong-Bin Wang; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : The characterization of a thin silicon dioxide (SiO2) film close to the silicon dioxide -silicon interface is very important in understanding and improving solid state electronic and optoelectronic devices. The refractive index, the dielectric constant, and the density of oxide film, are all related to the chemical composition and porosity (voids) of the films. LÄS MER