Sökning: "etch-stop"

Visar resultat 1 - 5 av 9 avhandlingar innehållade ordet etch-stop.

  1. 1. Adhesive Wafer Bonding for Microelectronic and Microelectromechanical Systems

    Författare :Niklaus Frank; KTH; []
    Nyckelord :adhesive; wafer; bonding; low temperature; CMOS compatible; selective; local; polymer; thermoplastic; thermosetting; intermediate layer; coating; benzocyclobutene; BCB; photoresist; epoxy; glue; wafer-level; sacrificial; etching; grinding; etch-stop;

    Sammanfattning : Semiconductor wafer bonding has been a subject of interestfor many years and a wide variety of wafer bonding techniqueshave been reported in literature. In adhesive wafer bondingorganic and inorganic adhesives are used as intermediatebonding material. LÄS MER

  3. 2. Silicon neural interfaces -Design and biomedical aspects-

    Författare :Lars Wallman; Avdelningen för Biomedicinsk teknik; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Elektronik och elektroteknik; Electronics and Electrical technology; pn-etch stop; biocompatibility; neural recordings; porous silicon; silicon; neural interface; sieve electrode; General biomedical sciences; Biomedicinska vetenskaper allmänt ;

    Sammanfattning : This thesis covers the development of a silicon neural interface, with focus on silicon sieve electrode fabrication, design, nerve regeneration, signal recording and biocompatibility. A study of how the via hole size and transparency of the perforated sieve membrane influences the nerve regeneration is presented together with a study on soft tissue responses to planar and porous silicon. LÄS MER

  4. 3. Fabrication of Group IV Semiconductors on Insulator for Monolithic 3D Integration

    Författare :Ali Asadollahi; Mikael Östling; Paul R. Berger; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; monolithic three dimensional M3D integration; strained germanium on insulator sGeOI pMOSFETs; silicon silicon-germanium on insulator sSOI sSiGeOI nMOSFETs; Si0.5Ge0.5 strain-relaxed buffer SRB ; direct bonding; chemical mechanical polishing CMP ; compressively strained GeOI; tensile strained Si0.5Ge0.5OI;

    Sammanfattning : The conventional 2D geometrical scaling of transistors is now facing many challenges in order to continue the performance enhancement while decreasing power consumption. The decrease in the device power consumption is related to the scaling of the power supply voltage (Vdd) and interconnects wiring length. LÄS MER

  5. 4. Silicon micromachining with applications in microoptics

    Författare :Carola Strandman; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Elektronik; Electronics;

    Sammanfattning : The microsystems technology (MST) is strongly evolving, constantly finding new application areas. Here, the area of microoptics is presented with examples of different solutions that MST has made possible within optical sensors, actuators, and optoelectronic systems. LÄS MER

  7. 5. InP HEMT Technology and Applications

    Författare :Anders Mellberg; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Indium phosphide InP ; cryogenic LNA; high electron mobility transistor HEMT ; metal-insulator-metal capacitor; MODFET; thin film resistor; semiconductor device fabrication; MMIC;

    Sammanfattning : Indium phosphide high electron mobility transistors (InGaAs/InAlAs/InP HEMTs) exhibit the highest cut-off frequencies and the lowest microwave noise figures of all transistor technologies. Both InP HEMT technology and associated circuit demonstrators are therefore interesting to explore further. LÄS MER