Avancerad sökning
Hittade 5 avhandlingar som matchar ovanstående sökkriterier.
1. Wafer-level heterogeneous integration of MEMS actuators
Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER
2. Novel RF MEMS Switch and Packaging Concepts
Sammanfattning : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. LÄS MER
3. High aspect ratio microsystem fabrication by ion track lithography
Sammanfattning : The microsystem processing of today is based on an assortment of diverse and contrasting fabrication techniques, sprung from the microelectronic industry. Microsystem technology has primarily been developed to meet the demands for scaled down low-cost sensor and actuator systems. These devices are based on a number of contrasting principles, e.g. LÄS MER
4. Microstructure technology in silicon, quartz, and diamond
Sammanfattning : Microstructure technology can be defined as a set of fabrication processes enabling three-dimensional structures featuring dimensions in the micrometer to millimetre range, with micrometer accuracy. Microstructures can be assembled or manufactured integrated with other structures and/or microelectronics forming complex microsystems. LÄS MER
5. Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends
Sammanfattning : This thesis presents novel millimeter-wave microelectromechanical-systems (MEMS) components for W-band reconfigurable beam-steering front-ends. The proposed MEMS components are novel monocrystalline-silicon dielectric-block phase shifters, and substrate-integrated three-dimensional (3D) micromachined helical antennas designed for the nominal frequency of 75 GHz. LÄS MER