Sökning: "electrochemical etching of silicon"
Visar resultat 1 - 5 av 12 avhandlingar innehållade orden electrochemical etching of silicon.
1. Wafer-level heterogeneous integration of MEMS actuators
Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER
2. Silicon nanowires, nanopillars and quantum dots : Fabrication and characterization
Sammanfattning : Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of required fabrication precision and high throughput, limits the large-scale use of nanodevices. LÄS MER
3. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves
Sammanfattning : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets. The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. LÄS MER
4. Silicon Nanopore Arrays : Fabrication and Applications for DNA Sensing
Sammanfattning : Nanopore biomolecule sensing and sequencing has emerged as a simple but powerful tool for single molecule studies over the past two decades. By elec- trophoretically driving single molecules through a nanometer-sized pore, often sitting in an insulating membrane that separates two buffer solutions, ionic current blockades can be detected to reveal rich information of the molecules, such as DNA length, protein size and conformation, even nucleic acid se- quence. LÄS MER
5. Silicon neural interfaces -Design and biomedical aspects-
Sammanfattning : This thesis covers the development of a silicon neural interface, with focus on silicon sieve electrode fabrication, design, nerve regeneration, signal recording and biocompatibility. A study of how the via hole size and transparency of the perforated sieve membrane influences the nerve regeneration is presented together with a study on soft tissue responses to planar and porous silicon. LÄS MER