Sökning: "electrochemical etching of silicon"

Visar resultat 1 - 5 av 12 avhandlingar innehållade orden electrochemical etching of silicon.

  1. 1. Wafer-level heterogeneous integration of MEMS actuators

    Detta är en avhandling från Stockholm : KTH

    Författare :Stefan Braun; Göran Stemme; Martin A. Schmidt; [2010]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; transfer integration; packaging; assembly; wafer bonding; adhesive bonding; eutectic bonding; release etching; electrochemical etching; microvalves; microactuator; Shape Memory Alloy; SMA; NITINOL; TiNi; NiTi; cold-state reset; bias spring; stress layers; crossbar switch; routing; switch; switch array; electrostatic actuator; S-shaped actuator; zipper actuator; addressing; transfer stamping; blue tape; TECHNOLOGY Information technology Computer engineering; TEKNIKVETENSKAP Informationsteknik Datorteknik;

    Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER

  2. 2. Silicon nanowires, nanopillars and quantum dots Fabrication and characterization

    Detta är en avhandling från Stockholm : KTH

    Författare :Robert Juhasz; Jan Linnros; Philippe M. Fauchet; [2005]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Silicon nanowires; silicon nanopillars; silicon quantum dots; size-reduction; thermal oxidation; electrochemical etching of silicon; photoluminescence; NATURAL SCIENCES Physics Condensed matter physics Semiconductor physics; NATURVETENSKAP Fysik Kondenserade materiens fysik Halvledarfysik;

    Sammanfattning : Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of required fabrication precision and high throughput, limits the large-scale use of nanodevices. LÄS MER

  3. 3. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Henrik Gradin; Göran Stemme; Peter Woias; [2012]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; wafer bonding; Au-Si; eutectic bonding; release etching; electrochemical etching; microvalves; microactuators; shape memory alloy; SMA; NiTinol; TiNi; NiTi; cold-state reset; bias spring; gate valves; wire bonding;

    Sammanfattning : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets.The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. LÄS MER

  4. 4. Silicon Nanopore Arrays Fabrication and Applications for DNA Sensing

    Detta är en avhandling från KTH Royal Institute of Technology

    Författare :Miao Zhang; Jan Linnros; Meni Wanunu; [2018]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; nanopore; array; electrochemical etching; DNA; optics; thermophoresis;

    Sammanfattning : Nanopore biomolecule sensing and sequencing has emerged as a simple but powerful tool for single molecule studies over the past two decades. By elec- trophoretically driving single molecules through a nanometer-sized pore, often sitting in an insulating membrane that separates two buffer solutions, ionic current blockades can be detected to reveal rich information of the molecules, such as DNA length, protein size and conformation, even nucleic acid se- quence. LÄS MER

  5. 5. Silicon neural interfaces -Design and biomedical aspects-

    Detta är en avhandling från Lars Wallman, Dept. of electrical measurements, box 118, 221 00 LUND

    Författare :Lars Wallman; [2001]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Elektronik och elektroteknik; Electronics and Electrical technology; pn-etch stop; biocompatibility; neural recordings; porous silicon; silicon; neural interface; sieve electrode; General biomedical sciences; Biomedicinska vetenskaper allmänt ;

    Sammanfattning : This thesis covers the development of a silicon neural interface, with focus on silicon sieve electrode fabrication, design, nerve regeneration, signal recording and biocompatibility. A study of how the via hole size and transparency of the perforated sieve membrane influences the nerve regeneration is presented together with a study on soft tissue responses to planar and porous silicon. LÄS MER