Sökning: "deep reactive ion etching"
Visar resultat 1 - 5 av 8 avhandlingar innehållade orden deep reactive ion etching.
1. Two-Dimensional Photonic Crystals in InP-based Materials
Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER
2. Submillimeter-Wave Waveguide Frontends by Silicon-on-Insulator Micromachining
Sammanfattning : This thesis presents novel radiofrequency (RF) frontend components in the submillimeter-wave (sub-mmW) range implemented by silicon micromachining, or deep reactive ion etching (DRIE). DRIE is rapidly becoming a driving technology for the fabrication of waveguide components and systems when approaching the terahertz (THz) frequency range. LÄS MER
3. Silicon micromachined waveguide components for terahertz systems
Sammanfattning : This thesis presents silicon micromachined waveguide components for sub-terahertz and terahertz (THz) systems fabricated by deep reactive ion etching (DRIE). Historically the main driving force for the development of THz systems has been space-based scientific instruments for astrophysics, planetary and Earth science missions. LÄS MER
4. Micromachined Interfaces for Medical and Biochemical Applications
Sammanfattning : .... LÄS MER
5. Advanced MEMS Technology for Terahertz Frequencies
Sammanfattning : With the development of terahertz (THz) technology, a variety of application demands are growing rapidly, such as high-rate communications, THz radars, environmental monitoring, medical imaging, and space exploration. However, the fabrication, integration, and packaging techniques for THz components and systems pose great challenges for a large-scale, cost-effective production. LÄS MER