Sökning: "dc-glow discharge plasma"

Hittade 2 avhandlingar innehållade orden dc-glow discharge plasma.

1. 1. Towards Controlled Growth and Applications of Carbon Nanotubes

   Författare :Raluca Elena Morjan; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; acetylene; carbon nanotubes; carbon feedstock; chemical vapor deposition; fullerenes; dc-glow discharge plasma; growth mechanism; metal catalyst;

   Sammanfattning : This thesis deals with growth, characterization and application of carbon nanotubes. The methods involved in the production of carbon nanotubes are thermal chemical vapor deposition (T-CVD) and plasma enhanced chemical vapor deposition (PE-CVD). LÄS MER

3. 2. Towards the Integration of Carbon nanostructures into CMOS technology

   Författare :Mohammad Kabir; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; transmission electron microscopy TEM .; chemical vapour deposition CVD ; electron beam lithography EBL ; carbon nanotube CNT ; silicidation; atomic force microscopy AFM ; carbon nanofiber CNF ; Complementary metal oxide semiconductor CMOS ; dc-glow discharge plasma; growth mechanism; metal catalyst; scanning electron microscopy SEM ;

   Sammanfattning : Relentless efforts for miniaturization of traditional complementary metal oxide semiconductor (CMOS) devices have reached the limit where the device characteristics are governed by quantum phenomena which are difficult to control. This engendered a need for finding alternative new materials that can be engineered to fabricate devices that will possess at least the same or even better performance than existing CMOS devices. LÄS MER