Sökning: "dc magnetron sputtering"
Visar resultat 1 - 5 av 50 avhandlingar innehållade orden dc magnetron sputtering.
1. Spectrally Selective Solar Absorbing Coatings Prepared by dc Magnetron Sputtering
Sammanfattning : Spectrally selective solar absorber using composite Ni-NiO as coating materials was studied. Samples were prepared by dc magnetron sputtering unit named Rulle, which is a miniature copy of an industrial roll-coater unit. LÄS MER
2. Fundamentals of High Power Impulse Magnetron Sputtering
Sammanfattning : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. LÄS MER
3. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation
Sammanfattning : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. LÄS MER
4. Plasma Characterization & Thin Film Growth and Analysis in Highly Ionized Magnetron Sputtering
Sammanfattning : The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). LÄS MER
5. Magnetron Sputter Epitaxy of GaN
Sammanfattning : Electronic-grade GaN (0001) epilayers have been grown directly on Al2O3 (0001) substrates by reactive DC-magnetron sputter epitaxy (MSE) from a liquid Ga sputtering target in an Ar/N2 atmosphere. The as-grown GaN epitaxial film exhibit low threading dislocation density on the order of ≤ 1010 cm-2 obtained by transmission electron microscopy and modified Williamson-Hall plot. LÄS MER