Sökning: "daniel magnfält"

Hittade 2 avhandlingar innehållade orden daniel magnfält.

  1. 1. Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux

    Detta är en avhandling från Linköping : Linköping University Electronic Press

    Författare :Daniel Magnfält; Linköpings universitet.; Linköpings universitet.; [2013]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : This thesis presents fundamental mechanisms of nucleation and early growth of and stress generation in thin polycrystalline metal films deposited using pulsed energetic deposition fluxes. The effects of a pulsed deposition flux and energetic bombardment on film nucleation was investigated using in situ stress measurements and in situ ellipsometry to determine the film thickness at which the films become continuous. LÄS MER

  2. 2. Fundamental processes in thin film growth The origin of compressive stress and the dynamics of the early growth stages

    Detta är en avhandling från Linköping : Linköping University Electronic Press

    Författare :Daniel Magnfält; Linköpings universitet.; Linköpings universitet.; [2014]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : The fundamental mechanisms behind the generation of compressive stresses in polycrystalline thin films, the effects of pulsed deposition fluxes on the dynamics of the early growth stages as well as the generation of energetic Ar+ ions in high power impulse magnetron sputtering (HiPIMS) discharges has been studied in this thesis.It was found that compressive film stresses in Mo films deposited using energetic vapor fluxes are correlated with high film densities while only a slight lattice expansion compared to relaxed Mo was found. LÄS MER