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1. 1. Diamond Microfabrication for Applications in Optics and Chemical Sensing

   Författare :Pontus Forsberg; Mikael Karlsson; Christoph Nebel; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; diamond; microfabrication; microoptics; coronagraph; waveguide; microelectrodes; superhydrophobic; Teknisk fysik med inriktning mot mikrosystemteknik; Engineering Science with specialization in Microsystems Technology;

   Sammanfattning : Diamond is a material with many exceptional properties. In this thesis methods for fabrication of microstructures as well as several applications of such structures in optics, microfluidics and electrochemistry are presented.A method for etching deep and highly precise gratings is described. LÄS MER