Sökning: "Wlodek Kaplan"

Hittade 1 avhandling innehållade orden Wlodek Kaplan.

1. 1. The use of self-aligned Ti silicide in integrated Si technology

   Författare :Wlodek Kaplan; KTH; []
   Nyckelord :;

   Sammanfattning : The performance and cost efficiency of integrated circuits(IC) are constantly improved by a miniaturization of theindividual device dimensions. As a consequence, the materialand electrical properties of conductors and contacts becomecritical, and fabrication technology development meets newchallenges from the continuous reduction of devicedimensions. LÄS MER