Sökning: "Ultra precision metrology"

Hittade 4 avhandlingar innehållade orden Ultra precision metrology.

  1. 1. Ultra precision metrology : the key for mask lithography and manufacturing of high definition displays

    Författare :Peter Ekberg; Lars Mattsson; Torgny Carlsson; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision metrology; LCD-display; OLED-display; nm-resolution; large area; random phase measurement; acousto-optic deflection; scanning; 2D measurement; mask; CCD; CMOS; image processing; edge detection; TECHNOLOGY; TEKNIKVETENSKAP; Manufacturing engineering; Produktionsteknik;

    Sammanfattning : Metrology is the science of measurement. It is also a prerequisite for maintaining a high quality in all manufacturing processes. In this thesis we will present the demands and solutions for ultra-precision metrology in the manufacturing of lithography masks for the TV-display industry. LÄS MER

  3. 2. Development of ultra-precision tools for metrology and lithography of large area photomasks and high definition displays

    Författare :Lars Peter Ekberg; Lars Mattsson; Lars Stiblert; Richard Leach; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Ultra precision 2D metrology; LCD-display; OLED-display; nm-resolution; random phase measurement; large area; photomask; acousto-optic deflection; self-calibration; Z-correction; absolute accuracy; uncertainty.; SRA - Production; SRA - Produktion;

    Sammanfattning : Large area flat displays are nowadays considered being a commodity. After the era of bulky CRT TV technology, LCD and OLED have taken over as the most prevalent technologies for high quality image display devices. LÄS MER

  4. 3. Engineering Epitaxial Graphene for Quantum Metrology

    Författare :Hans He; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Epitaxial Graphene; Magnetotransport; Quantum Resistance Metrology; Chemical Doping;

    Sammanfattning : Quantum resistance metrology deals both with the precise and accurate measurement of electrical resistance, by utilizing the quantum hall effect (QHE) in two-dimensional electron gases (2DEGs) such as those based on gallium arsenide (GaAs). Due to the unique properties of graphene, and specifically epitaxial graphene grown on silicon carbide (SiC/G), quantum Hall resistance (QHR) standards based on graphene perform better in a wider parameter space (temperature, current and magnetic field) than conventional semiconducting materials. LÄS MER

  5. 4. Scaling and Gating Attosecond Pulse Generation

    Författare :Christoph Heyl; Atomfysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Coherent imaging; Ultrafast electron dynamics; Single attosecond pulses; Attosecond pulse trains; XUV sources; High-order harmonic generation; XUV frequency combs; Fysicumarkivet A:2014:Heyl;

    Sammanfattning : High-order harmonic generation (HHG) provides the basis for attosecond light sources delivering coherent pulses in the extreme ultraviolet spectral region. Such light sources are employed for a variety of applications within imaging, attosecond spectroscopy, and high-precision frequency metrology. LÄS MER