Sökning: "Ulf Helmsersson"

Hittade 1 avhandling innehållade orden Ulf Helmsersson.

1. 1. Fundamental processes in thin film growth : The origin of compressive stress and the dynamics of the early growth stages

   Författare :Daniel Magnfält; Ulf Helmsersson; Eric Chason; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The fundamental mechanisms behind the generation of compressive stresses in polycrystalline thin films, the effects of pulsed deposition fluxes on the dynamics of the early growth stages as well as the generation of energetic Ar+ ions in high power impulse magnetron sputtering (HiPIMS) discharges has been studied in this thesis.It was found that compressive film stresses in Mo films deposited using energetic vapor fluxes are correlated with high film densities while only a slight lattice expansion compared to relaxed Mo was found. LÄS MER